Etch Chamber Performance and Influence of Turbo Pump Conductance Path

Etch Chamber Performance and Influence of Turbo Pump Conductance Path/span>

Authors- Deepak Doddabelavangala Srikantaiah

Abstract-Etch Chamber which use Silane Nitride Seasoning during Process has a common issue of Drift in Chamber pressure over a period of time resulting in Chamber failure. Apart from that, there are issues like Chamber to Chamber matching. Normally, the solution for this issue is to increase the foreline temperature, but after detailed study of turbo and its internal feature, it was identified that the internal features of Turbo Pump is Critical. The effect of Turbo pump on chamber performance can be resolved by changing the turbo operating temperature and its testing method

DOI: /10.61463/ijset.vol.12.issue5.271